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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Dmitriev, P.N. Lapitskaya, I.L. Filippenko, L.V. Ermakov, A.B. Shitov, S.V. Prokopenko, G.V. Kovtonyuk, S.A. Koshelets, V.P. |
| Copyright Year | 2002 |
| Abstract | A number of new fabrication techniques are developed and optimized in order to fit the requirements of contemporary superconducting electronics. To achieve ultimate performance of integrated submm receivers with operational frequency of 1 THz, tunnel junctions with AlN tunnel barrier having a R/sub n/S value as low as 1 /spl Omega//spl mu/m/sup 2/ have been developed. High quality characteristics of Nb/AlN/Nb tunnel junctions with R/sub j//R/sub n/=16 and R/sub n/S=10 /spl Omega//spl mu/m/sup 2/ have been demonstrated. Electron Beam Lithography (EBL) in combination with Chemical Mechanical Polishing (CMP) has been incorporated to produce Nb/AlN/Nb junctions with 0.03 /spl mu/m/sup 2/ area. A new approach to obtain overdamped Nb/AlO/sub x//Nb tunnel junctions has been proposed and realized. The dependencies of the main parameters of novel junctions on the current density and circuit geometry have been studied. These junctions may have a good potential in Josephson junction arrays and Single-Flux-Quantum applications (RSFQ). |
| Sponsorship | Council on Superconductivity Appl. Superconductivity Conference Inc MIT |
| Starting Page | 107 |
| Ending Page | 110 |
| Page Count | 4 |
| File Size | 514450 |
| File Format | |
| ISSN | 10518223 |
| Volume Number | 13 |
| Issue Number | 2 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2003-06-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Frequency Niobium Josephson junctions Fabrication Electron beams Lithography Chemicals Current density Circuits Geometry |
| Content Type | Text |
| Resource Type | Article |
| Subject | Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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