NDLI: Modeling and active disturbance rejection control for a piezoelectric-actuator driven nanopositioner

Content Provider	IEEE Xplore Digital Library
Author	Tongtong Leng Pengbo Liu Peng Yan Zhen Zhang Lei Guo
Copyright Year	2014
Description	Author affiliation: Key Lab. of High-efficiency & Clean Mech. Manuf., Shandong Univ., Jinan, China (Tongtong Leng; Pengbo Liu; Peng Yan) \|\| Dept. of Mech. Eng., Tsinghua Univ., Beijing, China (Zhen Zhang) \|\| Sch. of Autom. Sci. & Electr. Eng., Beihang Univ., Beijing, China (Lei Guo)
Abstract	This paper investigates the modeling and control problem of a novel piezoelectric-actuator (PZT) driven nanopositioner. The physical model of the nanopositioning stage is first discussed with the hysteresis nonlinearity of the PZT actuator. For the purposes of eliminating the hysteresis impact and various disturbances, an active disturbance rejection control (ADRC) algorithm is proposed, where the nonlinear dynamics of the model and external disturbances are treated as “total disturbances” which can be estimated by an extended state observer (ESO) and then compensated by a state feedback control law. The proposed algorithm is deployed in real time implementations on a nanopositioning servo platform and demonstrates good control performance in terms of high precision positioning and hysteresis elimination.
Starting Page	5910
Ending Page	5915
File Size	531480
Page Count	6
File Format	PDF
ISBN	9789881563873
ISSN	19341768
DOI	10.1109/ChiCC.2014.6895952
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-07-28
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	TCCT, CAA
Subject Keyword	Nanopositioning Bandwidth Piezoelectric actuators extended state observer (ESO) Observers Educational institutions active disturbance rejection control (ADRC) piezoelectric-actuator driven nanopositioning stage Mathematical model Hysteresis
Content Type	Text
Resource Type	Article

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