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Content Provider | IEEE Xplore Digital Library |
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Author | Nikfalazar, M. Mehmood, A. Sohrabi, M. Wiens, A. Zheng, Y. Maune, H. Jakoby, R. Mikolajek, M. Friederich, A. Kohler, C. Binder, J.R. |
Copyright Year | 2015 |
Description | Author affiliation: Inst. for Microwave Eng. & Photonics, Tech. Univ. of Darmstadt, Darmstadt, Germany (Nikfalazar, M.; Mehmood, A.; Sohrabi, M.; Wiens, A.; Zheng, Y.; Maune, H.; Jakoby, R.) || Karlsruhe Inst. of Technol. Eggenstein-Leopoldshafen, Inst. for Appl. Mater., Karlsruhe, Germany (Mikolajek, M.; Friederich, A.; Kohler, C.; Binder, J.R.) |
Abstract | This paper presents a novel topology and method for the fabrication of tunable ferroelectric components based on inkjet printing for phased arrays applications at C/X-Band. This method enables low voltage biased tunable phase shifters by inkjet printing of tunable dielectric thick films. The loaded line tunable phase shifter is tuned by integrated metal-insulator-metal (MIM) varactors. The MIM varactors are fabricated by photo lithography and subsequently inkjet printing of barium-strontium-titanate striplines, enabling a simple and reliable process. In comparison to coplanar capacitors, such MIM varactors require significantly lower DC-voltage for tuning. A tunability of 32 % at 8.5 GHz is achieved by applying only 25 V across a 1.2 μm thick BST film and a tunability of 46 % by applying 50 V. The 11 unit cells loaded line tunable phase shifter achieves a figure of merit (FoM) above 40 °/dB across 7 to 8.5 GHz by applying maximum 50 V tuning voltage. The size of the phase shifter is 1×0.45 cm2. |
Starting Page | 413 |
Ending Page | 416 |
File Size | 272401 |
Page Count | 4 |
File Format | |
ISBN | 9782874870408 |
DOI | 10.1109/EuMIC.2015.7345157 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2015-09-07 |
Publisher Place | France |
Access Restriction | Subscribed |
Rights Holder | EuMA |
Subject Keyword | Varactors Printing Fabrication Electrodes Ferroelectric BST Phase shifters Ink Inkjet printing Tuning Phase shifter |
Content Type | Text |
Resource Type | Article |
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