NDLI: A novel SOI-based single proof-mass 3-axis accelerometer with gap-closing differential capacitive electrodes in all sensing directions

Content Provider	IEEE Xplore Digital Library
Author	Chia-Pao Hsu Yi-Chang Hsu Ming-Chuen Yip Weileun Fang
Copyright Year	2010
Description	Author affiliation: NanoEngineering and MicroSystems Institute, National Tsing Hua University, HsinChu, Taiwan (Yi-Chang Hsu) \|\| Power Mechanical Engineering, National Tsing Hua University, HsinChu, Taiwan (Chia-Pao Hsu; Ming-Chuen Yip; Weileun Fang)
Abstract	This study presents a novel capacitive-type single proof-mass 3-axis accelerometer implemented on SOI wafer. This accelerometer contains special designed gap-closing differential sensing electrodes in all sensing directions. The present SOI-based 3-axis accelerometer has four merits, (1) the proof-mass is composed of device and handle layers of SOI wafer, (2) the sensitivity is improved by the gap-closing differential electrodes design in all sensing directions, (3) the sensing gap thickness is precisely defined by the box-oxide layer of SOI wafer, and (4) the poly-refilled via is used to implement the vertical interconnection between device layer and handle layer. In application, the single proof-mass 3-axis accelerometer is fabricated and characterized. The preliminary measurement results demonstrate the sensitivities of accelerometer are 9.56mV/G (X-axis), 6.9mV/G (Y-axis) and 14.51mV/G (Z-axis).
Starting Page	1188
Ending Page	1191
File Size	1540136
Page Count	4
File Format	PDF
ISBN	9781424481705
ISSN	19300395
e-ISBN	9781424481699
e-ISBN	9781424481682
DOI	10.1109/ICSENS.2010.5690641
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-11-01
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electrodes Sensors Accelerometers Sensitivity Acceleration Capacitance Springs and 3-axis accelerometer SOI single proof-mass gap closing electrode
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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