NDLI: A four degree of freedom MEMS microgripper with novel bi-directional thermal actuators

Content Provider	IEEE Xplore Digital Library
Author	Greminger, M.A. Sezen, A.S. Nelson, B.J.
Copyright Year	2005
Description	Author affiliation: Dept. of Mech. Eng., Minnesota Univ., Minneapolis, MN, USA (Greminger, M.A.; Sezen, A.S.)
Abstract	A four degree of freedom thermally actuated MEMS microgripper is presented in this paper. Each jaw of the microgripper has independent x and y degrees of freedom. These extra degrees of freedom give the gripper added dexterity for manipulating microparts. The motion of each gripper jaw is provided by a two degree of freedom compliant mechanism which is based on a five bar rigid link mechanism. This gripper also introduces a novel thermal microactuator design that is capable of bi-directional actuation giving it a greater range of motion than previous thermal actuator designs. The actuator provides a total range of motion of 12.7 /spl mu/m and a maximum force of 1.9 mN. Also, since this microgripper is based on a compliant mechanism, deformable object tracking can be used to provide force as well as position feedback for the gripper. This combination of an increased number of degrees of freedom and increased sensory feedback provides a level of dexterity that has not been previously available in microassembly.
Starting Page	2814
Ending Page	2819
File Size	366405
Page Count	6
File Format	PDF
ISBN	0780389123
DOI	10.1109/IROS.2005.1545137
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-08-02
Publisher Place	Canada
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Grippers Bidirectional control Force feedback Microassembly Thermal engineering Intelligent actuators Intelligent robots Force sensors Force measurement compliant mechanism Microgripper microassembly microrobotics MEMS
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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