NDLI: Control of the Growth Regimes of Nanodiamond and Nanographite in Microwave Plasmas

Content Provider	IEEE Xplore Digital Library
Author	Cheng, C.Y. Teii, K.
Copyright Year	1973
Abstract	Moderate-pressure microwave plasmas are used to deposit functional nanomaterials consisting of nanodiamond (ND) and/or nanographite. The growth conditions of ND, carbon nanowalls (CNWs), and ND/CNW composite films are categorized in a process map as functions of substrate temperature and Ar concentration with or without scratching pretreatment using diamond powder. Addition of high fractions of Ar to CH₄ plasmas facilitates the formation of C₂ radicals, which is responsible for decreasing the diamond grain size in ND film and enhancing graphitization into the form of graphitic walls in CNWs. The deposition of ND film is limited by substrate surface condition (scratching and seeding) rather than gas-phase condition, whereas that of CNWs is governed by gas-phase condition. A combination of a C₂-rich plasma with scratching pretreatment results in ND/CNW composite film, which increases the space between the walls favorably for better performance of field emission. Based on the insights into gas-phase and surface processes, the deposition mechanism of ND/CNW composite film is discussed to explore the possibility of controlling nano-arrangement of the walls.
Sponsorship	IEEE Nuclear and Plasma Sciences Society
Starting Page	1783
Ending Page	1788
Page Count	6
File Size	658754
File Format	PDF
ISSN	00933813
Volume Number	40
Issue Number	7
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-07-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Nanostructured materials Diamond-like carbon Substrates Chemical vapor disposition Plasma temperature Surface treatment Graphite Raman spectroscopy Amorphous carbon chemical vapor deposition (CVD) electron emitter graphene microwave (MW) nanocrystalline diamond nanographite optical emission
Content Type	Text
Resource Type	Article
Subject	Nuclear and High Energy Physics Condensed Matter Physics

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