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  1. Liquid Crystals Today
  2. Volume 21, 2012
  3. Volume: 21 Issue: 2
  4. Ferroelectric liquid crystal over silicon devices
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Volume 27, 2018
Volume 26, 2017
Volume 25, 2016
Volume 24, 2015
Volume 23, 2014
Volume 22, 2013
Volume 21, 2012
Volume: 21 Issue: 4
Volume: 21 Issue: 3
Volume: 21 Issue: 2
Editorial
Obituary Professor Danuta Bauman
Ferroelectric liquid crystal over silicon devices
19th Conference on Liquid Crystals
Liquid crystal news from industry
Liquid Crystals arrive back home at their birthplace
Liquid crystal research highlights: Liquid Crystals Today: Vol 21, No 2
Surfaces and Interfaces of Liquid Crystals, Th. Rasing and I. Musevic
Volume: 21 Issue: 1
Volume 20, 2011
Volume 19, 2010
Volume 18, 2009
Volume 17, 2008
Volume 16, 2007
Volume 15, 2006
Volume 14, 2005
Volume 13, 2004
Volume 12, 2003
Volume 11, 2002
Volume 10, 2001
Volume 9, 1999
Volume 8, 1998
Volume 7, 1997
Volume 6, 1996
Volume 5, 1995
Volume 4, 1994
Volume 3, 1993
Volume 2, 1992
Volume 1, 1991

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Ferroelectric liquid crystal over silicon devices

Content Provider Taylor & Francis Online
Author Wilkinson, Timothy D.
Abstract Over the past 20 years, ferroelectric liquid crystal over silicon (FLCOS) devices have made a wide impact on applications as diverse as optical correlation and holographic projection. To cover the entire gamut of this technology would be difficult and long winded; hence, this paper describes the significant developments of FLCOS within the Engineering Department at the University of Cambridge. The purpose of this paper is to highlight the key issues in fabricating silicon backplane spatial light modulators (SLMs) and to indicate ways in which the technology can be fabricated using cheap, low-density production and manufacturability. Three main devices have been fabricated as part of several research programmes and are documented in this paper. The fast bitplane SLM and the reconfigurable optical switches for aerospace and telecommunications systems (ROSES) SLM will form the basis of a case study to outline the overall processes involved. There is a great deal of commonality in the fabrication processes for all three devices, which indicates their potential strength and demonstrates that these processes can be made independent of the SLMs that are being assembled. What is described is a generic process that can be applied to any silicon backplane SLM on a die-by-die basis. There are hundreds of factors that can affect the yield in a manufacturing process and the purpose of a good process design procedure is to minimise these factors. One of the most important features in designing a process is fabrication experience, as so many of the lessons in this business can only be learned this way. We are working with the advantage of knowing the mistakes already made in the flat panel display industry, but we are also faced with the fact that those mistakes took many years and many millions of dollars to make. The fabrication process developed here originates and adapts earlier processes from various groups around the world. There are also a few totally new processes that have now been adopted by others in the field. Many, such as the gluing process, are still on-going and have to be worked on more before they will fully suit ‘manufacturability’.
Starting Page 34
Ending Page 41
Page Count 8
File Format PDF HTM / HTML
ISSN 1358314X 14645181
DOI 10.1080/1358314X.2012.669274
Journal Liquid Crystals Today
Volume Number 21
Issue Number 2
Language English
Publisher Taylor & Francis
Publisher Date 2012-03-26
Access Restriction Open
Subject Keyword Liquid crystals Ferroelectric Spatial light modulator Liquid crystal over silicon LCOS
Content Type Text
Resource Type Article
Subject Materials Chemistry Condensed Matter Physics Inorganic Chemistry
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