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Plasma-immersion ion-processed boron-doped diamond-like carbon films
| Content Provider | Scilit |
|---|---|
| Author | He, Xiao-Ming Walter, K. C. Nastasi, M. |
| Copyright Year | 2000 |
| Description | Journal: Journal of Physics: Condensed Matter Boron-doped diamond-like carbon (DLC) was prepared using an inductive radio-frequency Ar + $C_{2}$ $H_{2}$ + $B_{2}$ $H_{6}$ plasma-immersion ion-processing (PIIP) technique. The novel results show that B incorporation reduces the stress and that low-energy Ar-ion impingement suppresses the increase of the amount of hydrogen in the B-doped DLC film. An optimal combination of higher hardness, 24.6 - 28 GPa, and reduced stress was reached in DLC film doped with 4 to 10 at.% B. An increase in the $sp^{3}$ carbon and $sp^{3}$ CH bonding in the DLC films was found with B doping and was correlated with the enhancement of the properties. |
| Related Links | http://iopscience.iop.org/article/10.1088/0953-8984/12/8/105/pdf |
| Ending Page | L189 |
| Page Count | 7 |
| Starting Page | L183 |
| ISSN | 09538984 |
| e-ISSN | 1361648X |
| DOI | 10.1088/0953-8984/12/8/105 |
| Journal | Journal of Physics: Condensed Matter |
| Issue Number | 8 |
| Volume Number | 12 |
| Language | English |
| Publisher | IOP Publishing |
| Publisher Date | 2000-02-10 |
| Access Restriction | Open |
| Subject Keyword | Journal: Journal of Physics: Condensed Matter Metallurgy and Metallurgical Engineering Plasma Immersion Immersion Ion Doped Diamond Diamond Like Carbon Ion Processing |
| Content Type | Text |
| Resource Type | Article |
| Subject | Condensed Matter Physics Materials Science |
