NDLI: Low actuation voltage RF MEMS series switch with novel beam design

Content Provider	IEEE Xplore Digital Library
Author	Rahman, H.U. Hesketh, T. Ramer, R.
Copyright Year	2008
Description	Author affiliation: Sch. of Electr. Eng. & Telecommun., Univ. of New South Wales, Sydney, NSW (Rahman, H.U.; Hesketh, T.; Ramer, R.)
Abstract	Although radio frequency micro-electro-mechanical-systems (RF MEMS) switches have experienced intensive research in last decade. Major problems like high actuation voltage and low yield due to residual stress generated during the fabrication process still exist. In order to reduce the actuation voltage, we have designed and tested several configurations with different beam designs and actuation voltage as low as 6.39 V has been achieved. This paper presents an RF MEMS metal to metal contact series switch with novel low spring constant beam design. The problem of low yield due to residual stress has been addressed by introducing a dimple under the front tip of beam. The proposed design can easily be integrated in large multi-port structures. The fabrication of the switch has been implemented using a seven mask metal based process. The numerical and experimental results illustrate the novel cantilever beam switch with excellent RF performance. The cantilever beam switch shows a calculated actuation voltage of 6.39 V with 0.37 dB insertion loss and less than 22 dB return loss. The switch also exhibits an isolation of 23.5 dB for all frequency bands of interest.
Starting Page	116
Ending Page	119
File Size	1178822
Page Count	4
File Format	PDF
ISBN	9781424422104
DOI	10.1109/ICET.2008.4777485
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-10-18
Publisher Place	Pakistan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Switches Radiofrequency microelectromechanical systems Series Switch Residual stresses Radio frequency Fabrication Low voltage RF MEMS Contacts Low spring constant Metal to metal contact Structural beams Springs Testing
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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