NDLI: Novel design of MEMS ohmic RF switch with low voltage actuation

Content Provider	IEEE Xplore Digital Library
Author	Samaali, H. Najar, F. Choura, S. Nayfeh, A.H. Masmoudi, M.
Copyright Year	2009
Description	Author affiliation: Department of Engineering Science and Mechanics, MC 0219, Virginia Polytechnic Institute and State University, Blacksburg, 24061, USA (Nayfeh, A.H.) \|\| Applied Mechanics and Systems Research Laboratory, Tunisia Polytechnic School, BP 743, La Marsa 2078, Tunisia (Najar, F.) \|\| Micro Electro Thermal Systems Research Unit, National Engineers School of Sfax, BP 3038, Tunisia (Samaali, H.; Choura, S.; Masmoudi, M.)
Abstract	In this paper, we propose the design of an ohmic contact RF microswitch with low voltage actuation, where the upper and lower microplates are displaceable. We develop a mathematical model for the RF microswitch made up of two electrostatically-actuated microplates; each microplate is attached to the end of a microcantilever. We assume that the microbeam is flexible, the microplates are rigid bodies and the electrostatic force is nonlinear function of the displacement and voltage applied between the microplates. We formulate the static and eigenvalue problems associated with the proposed microsystem. We show that the resulting static pull-in voltage and switching time are reduced by 30 and 45%, respectively, as compared to those associated with a RF microswitch formed of a single microbeam-microplate system. We also show that, unlike the second and higher frequencies, a selected range of applied DC voltages, affects significantly the first frequency.
Starting Page	1
Ending Page	5
File Size	512783
Page Count	5
File Format	PDF
ISBN	9781424443970
DOI	10.1109/ICSCS.2009.5412256
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-11-06
Publisher Place	Tunisia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Microswitches Switches Reduced-order model Pull-out Microswitch Switching circuits Micromechanical devices Radio frequency Pull-in Low voltage Insertion loss Radiofrequency integrated circuits MEMS Ohmic contacts Electrostatics
Content Type	Text
Resource Type	Article

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