NDLI: Heat-based recovery mechanism to counteract stiction of RF-MEMS switches

Content Provider	IEEE Xplore Digital Library
Author	Repchankova, A. Iannacci, J.
Copyright Year	2009
Description	Author affiliation: DISI Università di Trento, Via Sommarive 14, 38100 Italy (Repchankova, A.) \|\| Fondazione Bruno Kessler, MemSRaD Via Sommarive 18, 38100 Italy (Iannacci, J.)
Abstract	Stiction of MEMS (MicroElectroMechanical System) switches for RF (Radio Frequency) applications is a critical issue as it may jeopardize temporarily or permanently the operability of such devices. In this work we present a novel mechanism to enable the self-recovery of RF-MEMS switches in case of stiction. It is based on the application of a restoring force on the stuck membrane, induced by the thermal stress due to self-heating of the switch itself. The heat is generated by a current driven through a high resistivity polysilicon serpentine housed underneath the anchoring points of the suspended switch. After a detailed theoretical analysis, we will report FEM-simulation results (Finite Element Method) describing the behaviour of the structure discussed in this paper.
Starting Page	176
Ending Page	181
File Size	595513
Page Count	6
File Format	PDF
ISBN	9781424438747
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-04-01
Publisher Place	Italy
Access Restriction	Subscribed
Rights Holder	EDA Publishing
Subject Keyword	Microelectromechanical systems Switches Conductivity Radiofrequency microelectromechanical systems Heat recovery Radio frequency Micromechanical devices self-recovery mechanism Thermal force Biomembranes RF-MEMS switch Thermal stresses stiction
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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