NDLI: Capacitive monitoring of electrostatic MEMS tunable evanescent-mode cavity resonators

Content Provider	IEEE Xplore Digital Library
Author	Xiaoguang Liu Fruehling, A. Katehi, L.P.B. Chappell, W.J. Peroulis, D.
Copyright Year	2011
Description	Author affiliation: Birck Nanotechnology Center, School of Electrical and Computer Engineering, Purdue University, West Lafayette, USA (Xiaoguang Liu; Fruehling, A.; Chappell, W.J.; Peroulis, D.) \|\| University of California, Davis, USA (Katehi, L.P.B.)
Abstract	This paper presents for the first time a novel concept for monitoring the resonant frequency of electrostatic MEMS tunable high-Q evanescent-mode cavity resonators through capacitance measurement. The proposed scheme relies on the fact that there is a one-to-one correspondence between the actuation capacitance Cs and the resonant frequency f0. This relationship is derived theoretically using a spring-mass model. The proposed monitoring concept is then validated by static measurement using a capacitance meter. Discussions are given on implementing a dynamic monitoring scheme by using custom-designed integrated high-speed CMOS capacitance sensors.
Starting Page	466
Ending Page	469
File Size	766921
Page Count	4
File Format	PDF
ISBN	9781612842363
e-ISBN	9782874870231
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-10-10
Publisher Place	United Kingdom
Access Restriction	Subscribed
Rights Holder	EUROPEAN MICROWAVE ASSOC
Subject Keyword	Micromechanical devices tunable resonator Resonant frequency feedback control Capacitance Cavity resonators evanescent-mode resonator Sensors Capacitance measurement Monitoring
Content Type	Text
Resource Type	Article

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