NDLI: Threshold voltage shift instability induced by plasma charging damage in MOSFETs with high-k dielectric

Content Provider	IEEE Xplore Digital Library
Author	Eriguchi, K. Kamei, M. Okada, K. Ohta, H. Ono, K.
Copyright Year	2008
Description	Author affiliation: Grad. Sch. of Eng., Kyoto Univ., Kyoto (Eriguchi, K.; Kamei, M.; Ohta, H.; Ono, K.)
Abstract	Polarities of plasma charging damage in n- and p-channel MOSFETs with Hf-based high-k gate stack $(HfAlOx/SiO_{2})$ were studied for two different plasma sources (Ar-and Cl-based gas mixtures), and found to depend on plasma conditions, in contrast to those with conventional $SiO_{2}.$ For Ar-plasma, which was confirmed to induce a larger charging damage, both n- and p-ch MOSFETs with high-k gate stacks suffer from negative charge trapping, whereas for Cl-plasma confirmed to induce less damage, both n- and p-ch MOSFETs with high-k gate stacks suffer from positive charge trapping, i.e., the direction of threshold voltage $(V_{t})$ shift depends on plasma sources and a amount of charging damage. From the results of constant-current stress tests, the present unique $V_{t}$ shifts were attributed to the characteristic hole and electron trapping phenomena, implying the necessity of taking the intrinsic charge trapping process into consideration for accurate evaluations of charging damage on high-k gate dielectrics.
Starting Page	97
Ending Page	100
File Size	394727
Page Count	4
File Format	PDF
ISBN	9781424418107
DOI	10.1109/ICICDT.2008.4567255
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-06-02
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Threshold voltage MOSFETs High-K gate dielectrics High K dielectric materials Plasma sources Plasma devices Electron traps Dielectric materials Dielectric measurements Capacitance-voltage characteristics constant current stress plasma-induced damage charging SiO2 high-k trap threshold voltage
Content Type	Text
Resource Type	Article

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