NDLI: Pulse Evaluation of Integrated Circuit Metallization as an Alternative to SEM

Content Provider	IEEE Xplore Digital Library
Author	McAteer, O.J.
Copyright Year	1977
Description	Author affiliation: Advisory Engineer, Westinghouse Electric Corporation, Advanced Technology Laboratories, Baltimore, Maryland 21203. 301-765-7259 (McAteer, O.J.)
Abstract	The present accepted industry-wide method of evaluating integrated circuit metallization is scanning electron microscope (SEM) inspection. This method, which has recently been incorporated into Mil-Std-883 (method 2018), is costly, time consuming, and subjective. A simple pulse technique that is inexpensive and objective has proven to be an effective alternative to the SEM method. Because of physical limitations of the pulse method in discerning certain reduced cross-sectional areas, limited usage of the pulse technique is recommended. This method, supplemented by the SEM, can result in significant cost savings.
Starting Page	217
Ending Page	224
File Size	7048032
Page Count	8
File Format	PDF
ISSN	07350791
DOI	10.1109/IRPS.1977.362795
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1977-04-12
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Pulse circuits Integrated circuit metallization Scanning electron microscopy Testing Integrated circuit technology Laboratories Metals industry Inspection Costs Microelectronics
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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Pulse Evaluation of Integrated Circuit Metallization as an Alternative to SEM