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Content Provider | IEEE Xplore Digital Library |
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Author | Yamamoto, Y. Shinozaki, R. Oka, Y. Asahi, I. Ninomiya, H. Shimokawa, F. Oohira, F. Takao, H. |
Copyright Year | 2015 |
Description | Author affiliation: Kagawa Univ., Kagawa, Japan (Yamamoto, Y.; Shinozaki, R.; Oka, Y.; Asahi, I.; Shimokawa, F.; Oohira, F.; Takao, H.) || Shikoku Res. Inst., Kagawa, Japan (Ninomiya, H.) |
Abstract | In this paper, a novel rotational MEMS diffraction grating for realization of micro-sized spectroscope system with SiOB (Silicon Optical Bench) technology is newly developed, and its evaluation results are reported for the first time. Since this device has “out-of-plane” optical surface on the rotational actuator, concept of micro optical bench is applicable to realize precision alignment in the micro spectrometer. A diffraction grating was fabricated by silicon, and it is mounted on the stage of an electrostatic rotational actuator. Driving the stage by ±3.5° at DC80V, wavelength of white light was successfully modulated in the range from 515nm to 763nm at an 11% diffraction efficiency. |
Starting Page | 208 |
Ending Page | 211 |
File Size | 2588203 |
Page Count | 4 |
File Format | |
ISBN | 9781479989553 |
ISSN | 21641641 |
DOI | 10.1109/TRANSDUCERS.2015.7180898 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2015-06-21 |
Publisher Place | USA |
Access Restriction | Subscribed |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Diffraction gratings Diffraction Optical device fabrication Micromechanical devices Optical fibers Actuators Diffraction Grating Optical-MEMS Optical Bench |
Content Type | Text |
Resource Type | Article |
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