NDLI: A MEMS torsional resonant magnetometer for the attitude determination in space

Content Provider	IEEE Xplore Digital Library
Author	Ren, D.H. Cui, M.Y. Wu, L.Q. Guo, T.W. Xu, C.T. You, Z.
Copyright Year	2013
Description	Author affiliation: Dept. of Precision Instrum., Tsinghua Univ., Beijing, China (Ren, D.H.; Cui, M.Y.; Wu, L.Q.; Guo, T.W.; Xu, C.T.; You, Z.)
Abstract	We present a MEMS torsional resonance magnetometer based on Lorentz force, which consists of torsional structures, torsional beams, metal plates, a coil, and a glass substrate. The Lorentz force, introduced by the interaction of a current in the MEMS coil and an external horizontal magnetic field, leading to the displacement of the torsional structure, which can be detected by two sensing capacitors according to the differential change. Based on the comparison between the test and the simulation of the fabricated chip, a novel structure of folded torsional beam and double-layer excitation coil is introduced. To increase the sensitivity and the quality of the sensor, the step-height is decreased and a CMP process is employed. The improved MEMS processes, including fabrication, scribing, pressure welding and packaging, are accomplished after the optimization of the structure parameters. Also we analyzed the influences of the beam shape, the damping hole size, the coil turns and the double-layer coils on the sensor's performances. The prototype's performances including sensitivity, repeatability, resonant frequency and quality factor are tested in the low pressure environment. The results indicate that this micro magnetometer can meet the requirements of the attitude determination and control system employed in spacecrafts.
Starting Page	462
Ending Page	465
File Size	1463116
Page Count	4
File Format	PDF
ISBN	9781467359832
ISSN	21641641
DOI	10.1109/Transducers.2013.6626803
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-06-16
Publisher Place	Spain
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Magnetic resonance Magnetometers Magnetomechanical effects Micromechanical devices Magnetic field measurement Coils attitude determination Magnetometer MEMS resonance lorentz force
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
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