NDLI: A low-cost 64/spl times/64 uncooled infrared detector array in standard CMOS

Content Provider	IEEE Xplore Digital Library
Author	Eminoglu, S. Tanrikulu, M.Y. Akin, T.
Copyright Year	2003
Description	Author affiliation: Dept. of Electr. & Electron. Eng., Middle East Tech. Univ., Ankara, Turkey (Eminoglu, S.; Tanrikulu, M.Y.; Akin, T.)
Abstract	This paper reports the development of a low-cost, 64/spl times/64 uncooled infrared focal plane array (FPA) based on suspended and thermally isolated p/sup +/-active/n-well diodes in a standard 0.35 /spl mu/m CMOS process. The array is implemented using a simple post-CMOS process that do not require any critical lithography or complicated deposition steps. The pixel is 40 /spl mu/m/spl times/40 /spl mu/m in size with a fill factor of 44%, and it has a measured DC responsivity of 4970 V/W with a thermal time constant of 36 msec at 80 mTorr vacuum. The detector noise is measured as 0.52 /spl mu/V for a 4 kHz electrical bandwidth with a 1/f corner frequency of 4.4 Hz, resulting in a measured detectivity of 9.7/spl times/10/sup 8/cm Hz/sup 1/2/W and an estimated NETD value of 470 mK for an f=1 optics. The FPA is scanned at 30 fps using a 16-channel parallel readout circuit with low noise preamplifiers. The preamplifiers have a measured noise of 0.48 /spl mu/V, resulting in an overall estimated NETD of 800 mK, which can be decreased by increasing the number of parallel readout channels. The uncompensated pixel voltage non-uniformity is measured as 0.82%, which easily decreases down to 0.05% by compensating the fixed pattern noise. Considering its simple fabrication method and its moderate performance, this approach is suitable for low-cost commercial infrared imaging applications.
Sponsorship	IEEE Electron Devices Soc
Starting Page	316
Ending Page	319
File Size	401355
Page Count	4
File Format	PDF
ISBN	0780377311
DOI	10.1109/SENSOR.2003.1215316
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-06-08
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Infrared detectors Sensor arrays Noise measurement Optical noise Frequency measurement Electric variables measurement Frequency estimation Circuit noise Preamplifiers Diodes
Content Type	Text
Resource Type	Article

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