NDLI: A novel two axis actuator for high speed large angular rotation

Content Provider	IEEE Xplore Digital Library
Author	Dhuler, V.R. Walters, M. Mahadevan, R. Cowen, A.B. Markus, K.W.
Copyright Year	1997
Description	Author affiliation: MCNC, NC, USA (Dhuler, V.R.)
Abstract	Reports the development of a novel two axis rotary actuator capable of high frequency out-of-plane rotation in two fully independent axes with large angular excursions. Initial results indicate that using the novel suspension and actuation mechanism presented permits large rotations exceeding /spl plusmn/13.5 degrees at rotational speeds exceeding 15 kHz, using excitation voltages below 100 V. The device is fabricated using a combination of surface and bulk micromachining. In this work the actuators are used to rotate single crystal silicon plates of sizes up to 1 mm/sup 2/. The size of such a device is less than 4 mm/sup 2/ making it suitable for a variety of new applications, such as micropositioning systems, inertial systems, microoptical elements, and compact imaging systems.
Starting Page	327
Ending Page	330
File Size	592002
Page Count	4
File Format	PDF
ISBN	0780338294
DOI	10.1109/SENSOR.1997.613650
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1997-06-19
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Pneumatic actuators Silicon Voltage Electrostatic actuators Electrodes Optical sensors Motion control Optical control Control systems Boron
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
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