NDLI: High speed whole wafer film thickness mapper

Content Provider	IEEE Xplore Digital Library
Author	Ledger, A.M. Clapis, P.J.
Copyright Year	1993
Description	Author affiliation: Hughes Danbury Optical Syst. Inc., Danbury, CT, USA (Ledger, A.M.; Clapis, P.J.)
Abstract	An instrument for rapidly generating a thickness map of the silicon overlayer in SOI wafers has recently been developed. This instrument can view entire wafers up to 200 mm in diameter by using a high-resolution wide-field optical system and CCD camera. The output from the camera comprises a set of digitized multispectral images of the SOI wafer; these images are used to generate reflectance maps of the bonded wafer at a discrete number of wavelengths and are then used to compute the silicon thickness over the entire wafer by comparing measured spectral patterns with a pre-computed library. Pattern matching algorithms are used in conjunction with a parallel processor, yielding measurement speeds orders of magnitude faster than conventional instruments (e.g. one minute for a 64/spl times/64 array of locations). The technique simultaneously measures the buried oxide thickness, an important capability in SOI wafer fabrication. Measurement accuracy is better than /spl plusmn/2 nm with excellent repeatability.
Starting Page	64
Ending Page	65
File Size	163652
Page Count	2
File Format	PDF
ISBN	0780313461
DOI	10.1109/SOI.1993.344590
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1993-10-05
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Instruments Optical films Silicon Thickness measurement Wavelength measurement High speed optical techniques Charge coupled devices Charge-coupled image sensors Cameras Multispectral imaging
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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