NDLI: Channel modulated AlGaN/GaN HEMTs employing fluoride plasma treatment

Content Provider	IEEE Xplore Digital Library
Author	Kyu Heon Cho Young Hwan Choi Jiyong Lim Young Shil Kim In Hwan Ji Min Koo Han
Copyright Year	2008
Description	Author affiliation: Sch. of Electr. Eng., Seoul Nat. Univ., Seoul (Kyu Heon Cho; Young Hwan Choi; Jiyong Lim; Young Shil Kim; In Hwan Ji; Min Koo Han)
Abstract	We proposed channel modulated AlGaN/GaN high electron mobility transistors (HEMTs) employing fluoride plasma treatment and carried out the detailed numerical simulation of device operation using ISE-TCAD. The reduction of peak electric field is required to achieve the high breakdown voltage of AlGaN/GaN HEMTs. Proposed channel modulated AlGaN/GaN HEMTs created the fluoride plasma treated region between the gate and the drain. The fluoride plasma treated region modulated the two-dimensional electron gas (2-DEG) channel concentration, and effectively reduced the peak electric field without any field plates. The reduction of peak electric field in the gate-to-drain region made the breakdown voltage increased by 206 %. DC characteristics of channel modulated AlGaN/GaN HEMTs remained practically the same as those of the conventional AlGaN/GaN HEMTs. The breakdown voltage could be increased without a significant degradation of DC characteristics due to the $SiO_{2}$ passivation layer. The deposition of $SiO_{2}$ passivation layer combining with fluoride plasma treatment is a powerful process for channel modulated AlGaN/GaN HEMTs.
Starting Page	2172
Ending Page	2176
File Size	727297
Page Count	5
File Format	PDF
ISBN	9781424416677
ISSN	02759306
DOI	10.1109/PESC.2008.4592264
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-06-15
Publisher Place	Greece
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Aluminum gallium nitride Gallium nitride HEMTs MODFETs Plasmas Electric fields Logic gates
Content Type	Text
Resource Type	Article

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