NDLI: Sensitivity tunable capacitive type micro accelerometer

Content Provider	IEEE Xplore Digital Library
Author	Chang Han Je Sungsik Lee Myung Lae Lee Sunghae Jung Lee, A. Gunn Hwang Byoung Gon Yu Chang Auck Choi
Copyright Year	2008
Description	Author affiliation: Convergence Component & Mater. Res. Lab., Electron. & Telecommun. Res. Inst. (ETRI), Daejeon (Chang Han Je; Sungsik Lee; Myung Lae Lee; Sunghae Jung; Lee, A.; Gunn Hwang; Byoung Gon Yu; Chang Auck Choi)
Abstract	In this paper, we present a novel sensitivity tunable capacitive type micro accelerometer which could adjust its sensitivity. The previous bulk-micromachined accelerometer is hard to make a pattern which is smaller than 1 um with high aspect ratio because of ICP etching errors such as loading effect and footing. In this paper, by making movable ground electrodes which have MEMS actuators, we present a high sensitivity micro accelerometer with a narrow sensing gap under 1 um using conventional bulk micromachining. Unlike previous capacitive type MEMS accelerometers which have anchored ground electrodes, the proposed micro accelerometer has movable ground electrodes. By simply applying DC bias to MEMS actuators, the ground electrodes are moved to the sensing electrodes. The fabricated sensing gap is 1.9 um and it could be reduced to 0.8 um according to the actuation voltage, $V_{DD}.$ The working sensitivity of the micro accelerometer is 0.410 pF/g at $V_{DD}=1.0$ V, which is higher than 0.125 pF/g with no actuation, $V_{DD}=0$ V.
Starting Page	1020
Ending Page	1023
File Size	1158446
Page Count	4
File Format	PDF
ISBN	9781424425808
ISSN	19300395
DOI	10.1109/ICSENS.2008.4716616
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-10-26
Publisher Place	Italy
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Accelerometers Electrodes Micromechanical devices Capacitance Micromachining Acceleration Force sensors Springs Electrostatic actuators Gunn devices
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

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