NDLI: SPC precaution system

Content Provider	IEEE Xplore Digital Library
Author	Chen, M.F. Huang, M.C.
Copyright Year	2004
Description	Author affiliation: Taiwan Semicond. Manuf. Co., Hsinchu (Chen, M.F.; Huang, M.C.)
Abstract	Every module setup lot of charts to monitor off-line process data. Most of charts are sensitive to inline process data. Although each of charts had set control limit and specification to warn the process while trending up or down, there are still have risk to cause product fail due to narrow process window. It's very difficult and impossible to take care of all charts on manufacturing to find which of them are not stable. The paper shows a new methodology to take care of all of chart on manufacturing. The engineers only have to group the charts having the same process property (ex, resist THK, CD, Overlay, ETH, Etch-Rate, etc...) on system. This system will automatic create report and send the warning messages to engineer through the e-mail. It is very helpful for the module to find out which are the worst or getting worse charts. Engineer can take action early before the chart going worst and all of abnormal event can be prevented in advance. This new methodology not only increased the stability of production line, but also saved lot of manpower to handle abnormal event
Sponsorship	Taiwan Semiconductor Ind. Assoc. IEEE Electron Devices Soc. Taipei Chapter
Starting Page	186
Ending Page	189
File Size	210116
Page Count	4
File Format	PDF
ISBN	0780384695
DOI	10.1109/SMTW.2004.1393761
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2004-09-09
Publisher Place	Taiwan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Control systems Semiconductor device manufacture Pulp manufacturing Condition monitoring Resists Etching Electronic mail Stability Production Systems engineering and theory
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Manufacturing ownership of work-in-process control

Modeling, validation and control of manufacturing systems

Applications of Control to Semiconductor Manufacturing: Reactive Ion Etching

The tool efficiency monitoring system creation of furnace area in semiconductor manufacturing

An overview of semiconductor fab automation systems

Yield & Reliability challenges of BEOL Interconnects

Forward echelon-based inventory monitoring in semiconductor supply chain

Successful Implementation of SPC in Semiconductcor Final Test

Optimising electronic manufacturing processes

SPC precaution system

Similar Documents

Manufacturing ownership of work-in-process control

Modeling, validation and control of manufacturing systems

Applications of Control to Semiconductor Manufacturing: Reactive Ion Etching

The tool efficiency monitoring system creation of furnace area in semiconductor manufacturing

An overview of semiconductor fab automation systems

Yield & Reliability challenges of BEOL Interconnects

Forward echelon-based inventory monitoring in semiconductor supply chain

Successful Implementation of SPC in Semiconductcor Final Test

Optimising electronic manufacturing processes

SPC precaution system