NDLI: Modeling the performance of cluster-based fabs

Content Provider	IEEE Xplore Digital Library
Author	Wood, S.C. Saraswat, K.C.
Copyright Year	1991
Description	Author affiliation: Center for Integrated Syst., Stanford Univ., CA, USA (Wood, S.C.)
Abstract	The economic performance of cluster tools is evaluated by modeling a hypothetical cluster-based fab, where almost all of a 0.6- mu m DRAM (dynamic random-access memory) process flow is performed in cluster tools. A conventional fab under the same cost constraint running the same flow is also modeled as a base for comparison. From this model, a number of inherent differences between cluster-based fabs and conventional fabs are observed and described. Monte Carlo cost-based simulations are then run on the two fabs to compare the potential cost and throughput time performance of the fabs. Results suggest that the cluster-based fab can operate at considerably reduced throughput times for a relatively small cost per wafer premium. Modeling the cluster-based fab revealed a number of fab design and management issues that are much less significant or nonexistent for conventional fabs. These issues include configuration and scheduling, lot size, and scaling the fab.
Starting Page	8
Ending Page	14
File Size	744165
Page Count	7
File Format	PDF
ISBN	0780300270
DOI	10.1109/ISMSS.1991.146258
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1991-05-20
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Costs Semiconductor device manufacture Monitoring Random access memory Throughput Manufacturing processes Production Communication standards Pulp manufacturing Performance evaluation
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Libarray of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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