NDLI: CIM approach for VLSI manufacturing

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IEEE/SEMI International Semiconductor Manufacturing Science Symposium. Theme: 'Semiconductor Manufacturing'. ISMSS '89 Proceedings (Cat. No.89CH2699-7)

CIM approach for VLSI manufacturing

Content Provider	IEEE Xplore Digital Library
Author	Komiya, H. Suizu, K.
Copyright Year	1989
Description	Author affiliation: Mitsubishi Electr. Corp., Itami, Japan (Komiya, H.; Suizu, K.)
Abstract	Summary form only given. For two types of production-small-variety/large-volume production and large-variety production-CIM (computer integrated manufacturing) lines have been developed and constructed for the whole production process from wafer fabrication to final testing. Each wafer fabrication line is constructed with a block structure having a somewhat different pattern, depending on the production type. The wafer testing, assembly, and final testing lines are constructed on the basis of a linear structure with multi-passages. For small-variety/large-volume production, it is sufficient for the characteristics of the block structure to approximate those of the linear structure closely. The wafer fabrication line is divided into several blocks according to the process steps. Each block consists of modules in which several pieces of equipment are integrated using transfer robots, an in/out station, and, in some cases, temporary storage. For large-variety production, a block structure similar to a job-shop structure is more suitable for improving flexibility. The wafer fabrication line is divided, for example, into two blocks for the master and the slice levels. However, this type of line needs sufficient capacity and efficiency in the work transport system and a complex distributed network hierarchy architecture for the control system.
File Size	109599
File Format	PDF
DOI	10.1109/ISMSS.1989.77254
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1989-05-22
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Computer integrated manufacturing Very large scale integration Production Process control Fabrication Communication system control Control systems Testing Automatic control Manufacturing automation
Content Type	Text
Resource Type	Article

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