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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Jung-Hyung Kim Sang-Chul Choi Yong-Hyun Shin Kwang-Hwa Chung |
| Copyright Year | 2003 |
| Description | Author affiliation: Center for Vacuum Technol., Korea Res. Inst. of Stand. & Sci., Daejeon, South Korea (Jung-Hyung Kim; Sang-Chul Choi; Yong-Hyun Shin; Kwang-Hwa Chung) |
| Abstract | Summary form only given, as follows. The absolute, spatially resolved electron densities in inductively coupled plasmas have been measured by using two different plasma diagnostic tools, a plasma absorption probe and double Langmuir probe. The plasma absorption probe is able to measure the absolute, spatially resolved electron density even when the probe is soiled with processing plasmas. The technique is based on the resonant absorption of surface waves excited in a cavity at the probe head. The plasma absorption probe consists of a small antenna connected with a coaxial cable. The antenna is enclosed in a tube inserted in a plasma. The plasma source is a planar inductively coupled plasma. Over a wide parameter range (gas type, input power and gas pressure), the results by the two techniques are compared and analyzed. |
| Sponsorship | Plasma Sci. & Applications Committee of the IEEE Nucl. & Plasma Sci. Soc. Hanyang Univ. Japan Soc. Plasma Res. Assoc. Korea Atomic Energy Res. Inst. Korea Basic Sci. Inst. Korea Vacuum Soc |
| File Size | 50542 |
| File Format | |
| ISBN | 078037911X |
| ISSN | 07309244 |
| DOI | 10.1109/PLASMA.2003.1228951 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2003-06-05 |
| Publisher Place | South Korea |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Plasma density Plasma measurements Probes Electrons Density measurement Absorption Plasma diagnostics Plasma materials processing Plasma waves Plasma sources |
| Content Type | Text |
| Resource Type | Article |
| Subject | Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering |
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