NDLI: Design and realization of magnetic actuators for optical matrix micro-switches

Content Provider	IEEE Xplore Digital Library
Author	Houlet, L. Reyne, G. Bourouina, T. Yasui, M. Hirabayashi, Y. Ozawa, T. Okano, Y. Fujita, H.
Copyright Year	2002
Description	Author affiliation: LIMMS/CNRS-IIS, Univ. of Tokyo, Japan (Houlet, L.)
Abstract	The research presented here deals with the design and the realization of matrix of copper microcoils as flat magnetic actuators for the actuation of optical matrix micro-switches. The matrix of micro-switches is composed by an array of vertical mirror supported by a silicon base. The bases are supported by springs connected to the frame of the matrix. The fixed optical fibers are inserted on the outer frame inside V-grooves. Due to the diameter of the light beam from optic fibers, large out-of-plane vertical displacements of the mirrors (more than 100 /spl mu/m) are to be achieved. This is compatible with large range electromagnetic actuation rather than electrostatic actuation. Earlier calculations performed under ANSYS/sup TM/ 5.6 showed that a magnetic force of about one milinewton is able to move the mirrors with such displacement range. Magnetic simulations have been performed under FLUX2D/sup TM/ in order to appraise some parameters in a real actuation configuration where the matrix of micro-coils is located below the matrix of micro-switches.
Starting Page	113
Ending Page	114
File Size	180366
Page Count	2
File Format	PDF
ISBN	0780375955
DOI	10.1109/OMEMS.2002.1031469
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-08-20
Publisher Place	Switzerland
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical design Actuators Microswitches Mirrors Optical fibers Optical beams Copper Silicon Springs Electromagnetic compatibility
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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