NDLI: Compact optical delay line based on scanning surface micromachined polysilicon mirrors

Content Provider	IEEE Xplore Digital Library
Author	Cornett, K.T. Heritage, J.P.
Copyright Year	2000
Description	Author affiliation: Dept. of Electr. & Comput. Eng., California Univ., Davis, CA, USA (Cornett, K.T.)
Abstract	The rapid scanning optical delay (RSOD), which is based on femtosecond pulse shaping technology, was developed to overcome the speed limitations of traditional approaches. In an RSOD the traditional translating mirror is replaced by a scanning mirror with a rotation angle of a few degrees. We present the integration of a scanning silicon micromirror into a compact RSOD geometry only about 5 cm in length. We demonstrate a 40 ps rapid scanning optical delay of 100 fs time scale optical pulses. Our RSOD is based on a surface micromachined tilt-up mirror. The polysilicon mirror is connected to a supporting frame with torsional polysilicon beams and is dynamically driven by an electrostatic comb-drive actuator. The rectangular mirror face is 760 /spl mu/m by 500 /spl mu/m, with a resonant frequency of 1060 Hz and a measured range of deflection of 16 degrees optical. The residual stress gradients give the micromirror a measured convex radius of curvature of 34 cm. The RSOD is characterized using a Michelson interferometer. The frequency and deflection characteristics of the micromirror are presented.
Starting Page	15
Ending Page	16
File Size	198319
Page Count	2
File Format	PDF
ISBN	0780362578
DOI	10.1109/OMEMS.2000.879605
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2000-08-21
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Delay lines Optical interferometry Ultrafast optics Mirrors Optical pulse shaping Micromirrors Electrostatic measurements Pulse shaping methods Silicon Geometrical optics
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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