NDLI: Selective molecular beam epitaxy for formation of networks of InP-based InGaAs/InAlAs quantum wires and dots

Content Provider	IEEE Xplore Digital Library
Author	Fujikura, H. Hanada, Y. Kihara, M. Hasegawa, H.
Copyright Year	1997
Description	Author affiliation: Sch. of Electron. & Inf. Eng., Hokkaido Univ., Sapporo, Japan (Fujikura, H.)
Abstract	Recent intensive research efforts in the study of quantum effects indicate that quantum nanostructures such as quantum wires and quantum dots may become key components of next-generation ultralarge scale integrated circuits based on quantum effects. For realizing such quantum LSIs, it is necessary to establish a suitable technology for formation of networks containing high quality quantum wires and dots with high packing density. For this purpose, selective MBE growth on patterned substrates appears to be promising because damage-free, extremely small and uniform, highly integrated, and position controlled quantum wires and dots can be formed only by the growth procedures. However, so far, there is no reports on selective growth formation of such quantum networks. This paper presents a novel selective MBE growth technology for formation of an InP-based In/sub 0.53/Ga/sub 0.47/As high quality quantum network. As the building blocks of such a network, the arrays of isolated wires, isolated dots and coupled wire-dot structures were successfully realized by further extending the selective MBE growth process on patterned substrates reported earlier.
Starting Page	459
Ending Page	462
File Size	409853
Page Count	4
File Format	PDF
ISBN	0780338987
ISSN	10928669
DOI	10.1109/ICIPRM.1997.600193
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1997-05-11
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Molecular beam epitaxial growth Indium gallium arsenide Indium compounds Quantum dots Wires Lithography Wet etching Substrates Chemicals US Department of Transportation
Content Type	Text
Resource Type	Article

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