NDLI: High-power and high-efficiency electrostatic actuator

Content Provider	IEEE Xplore Digital Library
Author	Niino, T. Egawa, S. Higuchi, T.
Copyright Year	1993
Description	Author affiliation: Dept. of Precision Mach. Eng., Tokyo Univ., Japan (Niino, T.; Egawa, S.)
Abstract	The authors have previously developed two types of concatenated electrostatic actuators which are driven by pulse excitation profiles. One of these actuators had excellent performance, but the efficiency of the driving circuit for the actuator was insufficient for practical applications. To improve the efficiency, an electrostatic actuator that can be driven by an AC excitation profile was developed. This linear surface-drive actuator weighs 7 g and consists of a thin slider and a stator. Each element has three-phase electrodes with the same pitch, and a three-phase AC driver connected to the electrodes operates the actuator. The efficiency is enhanced by a factor of approximately four. In addition, force and power generation performance is also improved; it produces 1.6 W of power and a 4.4-N propulsive force. The power/weight ratio is improved by a factor of about three, reaching 230 W/kg.
Starting Page	236
Ending Page	241
File Size	478898
Page Count	6
File Format	PDF
ISBN	078030957X
DOI	10.1109/MEMSYS.1993.296916
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1993-02-10
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electrostatic actuators Electrodes Stators Concatenated codes Hydraulic actuators Electromagnetic forces Servomotors Fabrication Power generation DC motors
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Deformable electrostatic linear motor

The two-dimensional micro conveyer: principles and fabrication process of the actuator

Development of an electrostatic actuator exceeding 10 N propulsive force

Performance improvement of electrostatic actuator by skewing electrodes

Multi-layered electrostatic film actuator

Fabrication of new electrostatic linear actuator

Development of a high thrust linear actuator with high backdrivability

Development of an electrostatic linear actuator by micromachining processes

The fabrication of an electrostatic linear actuator by silicon micromachining

High-power and high-efficiency electrostatic actuator

Similar Documents

Deformable electrostatic linear motor

The two-dimensional micro conveyer: principles and fabrication process of the actuator

Development of an electrostatic actuator exceeding 10 N propulsive force

Performance improvement of electrostatic actuator by skewing electrodes

Multi-layered electrostatic film actuator

Fabrication of new electrostatic linear actuator

Development of a high thrust linear actuator with high backdrivability

Development of an electrostatic linear actuator by micromachining processes

The fabrication of an electrostatic linear actuator by silicon micromachining

High-power and high-efficiency electrostatic actuator