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Content Provider | IEEE Xplore Digital Library |
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Author | Chapuis, Y.-A. Jalabert, L. Sarajlic, E. Vermeer, R. Collard, D. Fujita, H. |
Copyright Year | 2011 |
Description | Author affiliation: Transducers Science and Technology (TST) Group, MESA+, Institute for Nanotechnology, University of Twente, THE NETHERLANDS (Vermeer, R.) || CIRMM/IIS, The University of Tokyo, Japan (Sarajlic, E.) || LIMMS/CNRS-IIS (UMI 2820), The University of Tokyo, Japan (Chapuis, Y.-A.; Jalabert, L.; Collard, D.; Fujita, H.) |
Abstract | In this paper, we present latest results of a thermo-pneumatic microactuator based on polymer membrane and silicon technology. This device has application in distributed air-jet planar micromanipulation to levitate and convey small objects by changing air-flow direction on the surface. Our technology, combining deformable polymer membrane and movable silicon nozzle fabrication, offers many advantages compared to classic silicon technology, e.g. pneumatic microactuator array device. Those advantages are as follows: low-cost, reliable, simple batch fabrication process, multi-directional (4 directions) air-jet flow, low driving voltage (≤ 5 V), durability under high air-pressure, higher transparency for implementing photodetection capabilities, and enabling technology to use flexible and smart materials in MEMS. |
Starting Page | 141 |
Ending Page | 144 |
File Size | 1394351 |
Page Count | 4 |
File Format | |
ISBN | 9781424496327 |
ISSN | 10846999 |
e-ISBN | 9781424496341 |
DOI | 10.1109/MEMSYS.2011.5734381 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2011-01-23 |
Publisher Place | Mexico |
Access Restriction | Subscribed |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Biomembranes Silicon Microactuators Fabrication Polymers Geometry |
Content Type | Text |
Resource Type | Article |
Subject | Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering |
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