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Content Provider | IEEE Xplore Digital Library |
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Author | Kim, B. Lin, Y. Huang, W.-L. Akgul, M. Li, W.-C. Ren, Z. Nguyen, C.T.-C. |
Copyright Year | 2009 |
Description | Author affiliation: University of California, Berkeley, Department of EECS, Berkeley, California, USA (Kim, B.; Lin, Y.; Akgul, M.; Li, W.-C.; Ren, Z.; Nguyen, C.T.-C.) || University of California, Berkeley, Department of EECS, Berkeley, California, USA; RF Micro Devices, Greensboro, North Carolina, USA (Huang, W.-L.) |
Abstract | Micromechanical resonant displacement gain stages have been demonstrated that employ directionally engineered stiffnesses in resonant structures to effect displacement amplification from a driven input axis to an output axis. Specifically, the introduction of slots along the output axis of a 53-MHz wine-glass mode disk resonator structure realizes a single gain stage with a measured input-to-output displacement amplification of 3.08x. Multiple such mechanical displacement gain stages can then be cascaded in series via half-wavelength beam couplers to achieve multiplicative gain factors; e.g., two cascaded gain stages achieve a total measured gain of 7.94x. The devices have also been operated as resonant switches, where displacement gain allows impact switching via actuation voltages of only 400mV, which is 6x smaller than for previous resoswitches without displacement gain. The availability of such high frequency displacement gain strategies for resonant switches may soon allow purely mechanical periodic switching applications (such as power amplifiers and power converters) with much higher efficiencies than current transistor-based versions. |
Starting Page | 19 |
Ending Page | 22 |
File Size | 14736818 |
Page Count | 4 |
File Format | |
ISBN | 9781424429776 |
ISSN | 10846999 |
e-ISBN | 9781424429783 |
DOI | 10.1109/MEMSYS.2009.4805308 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2009-01-25 |
Publisher Place | Italy |
Access Restriction | Subscribed |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Micromechanical devices Resonance Switches Gain measurement Displacement measurement Couplers Mechanical variables measurement Voltage Availability Frequency conversion |
Content Type | Text |
Resource Type | Article |
Subject | Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering |
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