NDLI: Film actuators: Planar, electrostatic surface-drive actuators

Content Provider	IEEE Xplore Digital Library
Author	Egawa, S. Niino, T. Higuchi, T.
Copyright Year	1991
Description	Author affiliation: Inst. of Ind. Sci., Tokyo Univ., Japan (Egawa, S.; Niino, T.; Higuchi, T.)
Abstract	The authors present a variety of surface-drive film actuators and discuss their characteristics. An actuator consisting of a stator with three-phase 420 mu m-pitched electrodes and a slightly conductive slider was developed previously. A finer 100 mu m-pitched stator was fabricated and operated. A two-phase stator, whose fabrication is easier, was developed, and a two-phase 50 mu m-pitched stator was fabricated and tested. The need for conductivity on the slider narrows the application field of the actuator. An ion-charged motor which can drive most thin insulating films and uses an air ionizer to give charges on the slider was developed. The produced motive force is numerically and experimentally analyzed. The optimal gap between the electrodes and the slider surface is found to be around 20% of electrode pitch. The 100 mu m-pitched stator drives a slider at +or-250 V, 1000 Hz, producing 20 N/m/sup 2/ at maximum. Comparison between developed actuators demonstrates the advantages of fabricating fine electrodes.
Starting Page	9
Ending Page	14
File Size	466771
Page Count	6
File Format	PDF
ISBN	0879426411
DOI	10.1109/MEMSYS.1991.114761
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1991-01-30
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electrostatic actuators Stators Electrodes Rotors Fabrication Insulation Micromotors Polymer films Conductivity Conductive films
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Comparison of electrostatic and electromagnetic motors based on fabrication and performance criteria

Fabrication of electrodes for polymer actuators and sensors via self-assembly

Multi-layered electrostatic film actuator

Closed Loop Control Of An Electrostatic Linear Actuator And Its Application To A Micro

Ultrasonic micromotors: physics and applications

The electrostatic ultrasonic micromotor

Study torque ripple of the side-drive electrostatic micromotor

Fabrication And Characterization Of PZT Thin Films For Micromotors

Development of an electrostatic actuator exceeding 10 N propulsive force

Film actuators: Planar, electrostatic surface-drive actuators

Similar Documents

Comparison of electrostatic and electromagnetic motors based on fabrication and performance criteria

Fabrication of electrodes for polymer actuators and sensors via self-assembly

Multi-layered electrostatic film actuator

Closed Loop Control Of An Electrostatic Linear Actuator And Its Application To A Micro

Ultrasonic micromotors: physics and applications

The electrostatic ultrasonic micromotor

Study torque ripple of the side-drive electrostatic micromotor

Fabrication And Characterization Of PZT Thin Films For Micromotors

Development of an electrostatic actuator exceeding 10 N propulsive force

Film actuators: Planar, electrostatic surface-drive actuators