NDLI: Photolithography in anisotropically etched grooves

Content Provider	IEEE Xplore Digital Library
Author	Linder, S. Baltes, H. Gnaedinger, F. Doering, E.
Copyright Year	1996
Description	Author affiliation: Phys. Electron. Lab., Eidgenossische Tech. Hochschule, Zurich, Switzerland (Linder, S.; Baltes, H.)
Abstract	This paper presents a novel approach for printing patterns into anisotropically etched grooves of silicon wafers or onto other three-dimensional structures. The key to the technology is electrodeposition of photoresist, which yields a nearly conformal polymer coating even on highly textured surfaces. The photosensitivity of the resist is highest for the major mercury lamp emission lines. The resist may therefore be exposed with standard exposure tools reminiscent of microchip fabrication. The deteriorating influence of diffraction effects on image quality upon exposure through a shadow mask is presented together with appropriate countermeasures. Furthermore, a method is proposed to suppress reflections from planes with non-perpendicular incidence of radiation, e.g., sidewalls of anisotropically etched grooves.
Starting Page	38
Ending Page	43
File Size	1091603
Page Count	6
File Format	PDF
ISBN	0780329856
DOI	10.1109/MEMSYS.1996.493826
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1996-02-11
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Lithography Anisotropic magnetoresistance Etching Resists Printing Silicon Polymer films Surface texture Lamps Fabrication
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Mr. Siddhartha Mukherjee siddhartha@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	ndl-support@iitkgp.ac.in
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9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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