NDLI: Microassembly of complex and solid 3D MEMS by 3D vision-based control

Content Provider	IEEE Xplore Digital Library
Author	Tamadazte, B. Le Fort-Piat, N. Dembele, S. Marchand, E.
Copyright Year	2009
Description	Author affiliation: FEMTO-ST Institute, -AS2M-, UMR CNRS, 6174 - UFC / ENSMM / UTBM, 24 rue Alain Savary, 25000 Besançon, France (Tamadazte, B.; Le Fort-Piat, N.; Dembele, S.) \|\| INRIA Rennes-Bretagne Atlantique, IRISA, Lagadic, France (Marchand, E.)
Abstract	This paper describes the vision-based methods developed for assembly of complex and solid 3D MEMS (micro electromechanical systems) structures. The microassembly process is based on sequential robotic operations such as planar positioning, gripping, orientation in space and insertion tasks. Each of these microassembly tasks is performed using a pose-based visual control. To be able to control the microassembly process, a 3D model-based tracker is used. This tracker is able to directly provide the 3D micro-object pose at real-time and from only a single view of the scene. The methods proposed in this paper are validated on an automatic assembly of fives silicon microparts of 400 µm × 400 µm × 100 µm on 3-levels. The insertion tolerance (mechanical play) is estimated to 3 µm. The precision of this insertion tolerance allows us to obtain solid and complex micro electromechanical structures without any external joining (glue, wending. Promising positioning and orientation accuracies are obtained who can reach 0.3 µm in position and 0.2° in orientation.
Starting Page	3284
Ending Page	3289
File Size	1436276
Page Count	6
File Format	PDF
ISBN	9781424438037
DOI	10.1109/IROS.2009.5354488
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-10-10
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Microassembly Solids Micromechanical devices Automatic control Assembly systems Robotic assembly Electromechanical systems Orbital robotics Process control Layout
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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