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Content Provider | IEEE Xplore Digital Library |
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Author | Wittstruck, R.H. Tong, X. Emanetoglu, N.W. Wu, P. Chen, Y. Lu, Y. Ballato, A. |
Copyright Year | 2002 |
Description | Author affiliation: Sch. of Eng., Rutgers Univ., Piscataway, NJ, USA (Wittstruck, R.H.; Tong, X.; Emanetoglu, N.W.; Wu, P.; Chen, Y.; Lu, Y.) |
Abstract | Piezoelectric thin film ZnO and its ternary alloy MgZnO have broad applications in transducers, resonators, filters and sensors. In ZnO based multi-layer piezoelectric device structures, such as ZnO on r-Al/sub 2/O/sub 3/, multi-acoustic wave mode coupling between each layer in the multilayer structure must be considered. In this paper, we use transmission line representation to analyze frequency response of a structure based on piezoelectric Mg/sub x/Zn/sub 1-x/O. The structure is Al/Mg/sub x/Zn/sub 1-x/O/n/sup ++/ ZnO/r-sapphire, where the Al and n/sup ++/ ZnO layers serve as top and bottom electrodes, respectively. Due to the crystalline orientation of the n/sup ++/ ZnO electrode and r-plane sapphire used in this work, there exist quasi shear and longitudinal wave modes in the device. The simulation results and measured device response show general agreement. |
Sponsorship | IEEE Ultrasonics, Ferroelectrics, & Frequency Control Soc |
Starting Page | 36 |
Ending Page | 39 |
File Size | 287224 |
Page Count | 4 |
File Format | |
ISBN | 0780370821 |
DOI | 10.1109/FREQ.2002.1075852 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2002-05-31 |
Publisher Place | USA |
Access Restriction | Subscribed |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Acoustic waves Zinc oxide Transmission lines Electrodes Piezoelectric films Acoustic transducers Piezoelectric transducers Resonator filters Thin film sensors Acoustic sensors |
Content Type | Text |
Resource Type | Article |
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