NDLI: Fabrication of an Aspherical Microlens for OLED with Modified Etching Process

Content Provider	IEEE Xplore Digital Library
Author	Liu, K.H. Chen, M.F. Chen, Y.C. Hwang, Y.M. Pan, C.T. Shen, S.C. Chang, M.Y. Huang, W.Y. Li, W.C.
Copyright Year	2010
Abstract	Study on using a process which was combined LIGA (Lithographie Galvanoformung Abformung) with etching to manufacture an optical film of an aspherical microlens array (A-MLA), which can improve the extraction efficiency of an OLED (Organic Light-Emitting Diode). The extraction efficiency of a current OLED is not high due to its total internal reflection, and the luminance is also lower because of the low extraction efficiency. How to increase the extraction efficiency is a valuable topic to discuss. This study analyzes the manufacturing and design parameters of A-MLAs such as diameter of a microlens, dry etching parameters and electroforming rates. The experimental results indicate that the variation of the diameter is about 5% after the thermal reflow and dry etching process. Electroforming process is used to make a metal mold as the first mold after PDMS (Polydimethylsiloxane) mold is replicated called the secondary mold. In addition, it has an additional effect to refine the existing defects on photoresist surface. From the measured data of the luminance of the optical film with A-MLAs, they show that the luminance of OLEDs is enhanced more than that of common spherical-microlens array.
Starting Page	4838
Ending Page	4841
File Size	1541770
Page Count	4
File Format	PDF
ISBN	9781424468805
e-ISBN	9781424468812
DOI	10.1109/iCECE.2010.1170
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-06-25
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Extraction efficiency Dry etching Organic light emitting diodes Organic Light-Emitting Diode Optical films Arrays Microoptics Lenses PDMS Aspheric microlens array
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
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9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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