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Content Provider | IEEE Xplore Digital Library |
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Author | Verdyan, A. Azoulay, J. |
Copyright Year | 2000 |
Description | Author affiliation: Dept. of Sci., Holon Acad. Inst. of Technol., Israel (Verdyan, A.) |
Abstract | A report on our experimental study of the fabrication of YBCO thin film on Ni metal is presented. A simple inexpensive conventional vacuum system consists of a turbomolecular pump and featuring a base pressure better than 10/sup -3/ Pa was used for the YBCO thin film preparation. No device of any kind was applied to control or regulate the thickness or stoichiometry of the film during the evaporation process. During this stage of the evaporation process the substrate temperature was kept at 200/spl deg/C monitored by a chromel-alumel thermocouple attached to a nearby dummy substrate. The solid phase reaction was subsequently carried out at a temperature of 720/spl deg/C under low oxygen partial pressure of about 10 Pa for 20 minutes after which a further heat treatment was done at 490/spl deg/C for 40 minutes. The films thus obtained were evaluated for their electrical and structural properties. |
Starting Page | 49 |
Ending Page | 52 |
File Size | 165121 |
Page Count | 4 |
File Format | |
ISBN | 0780358422 |
DOI | 10.1109/EEEI.2000.924315 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2000-04-11 |
Publisher Place | Israel |
Access Restriction | Subscribed |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Superconducting epitaxial layers Yttrium barium copper oxide Superconducting thin films Substrates Temperature Fabrication Vacuum systems Transistors Thickness control Monitoring |
Content Type | Text |
Resource Type | Article |
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