NDLI: Resonant sensors for high accuracy pressure measurement using silicon technology

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Resonant sensors for high accuracy pressure measurement using silicon technology

Content Provider	IEEE Xplore Digital Library
Author	Parsons, P. Glendinning, A. Angelidis, D.
Copyright Year	1992
Description	Author affiliation: Schlumberger Ind., Farnborough, UK (Parsons, P.; Glendinning, A.; Angelidis, D.)
Abstract	A resonant element transducer has been developed for aerospace applications using micromachined silicon technology. The sensor is a beam supported over a square diaphragm. The resonant frequency of the beam is proportional to the applied pressure on the diaphragm. The authors describe the process of sensor construction, report on its physical characteristics, and summarize the performance evaluations which have been conducted to determine resonance frequency quality factor, temperature coefficient, and temperature and pressure hysteresis.<>
Starting Page	349
Ending Page	355
File Size	423525
Page Count	7
File Format	PDF
ISBN	078030652X
DOI	10.1109/NAECON.1992.220596
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1992-05-18
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Resonance Pressure measurement Temperature sensors Sensor phenomena and characterization Structural beams Resonant frequency Transducers Silicon Q factor Hysteresis
Content Type	Text
Resource Type	Article

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