NDLI: MEMS fluid density sensor based on oscillating piezoresistive microcantilever

Content Provider	IEEE Xplore Digital Library
Author	Guiming Zhang Rahman-Hebitul Libo Zhao Zhuangde Jiang Longqi Xu Jiuhong Wang Zhigang Liu
Copyright Year	2013
Description	Author affiliation: Key Lab. of Thermo-Fluid Sci. & Eng. of Minist. of Educ., Xi'an Jiaotong Univ., Xi'an, China (Zhigang Liu) \|\| State Key Lab. for Manuf. Syst. Eng., Xi'an Jiaotong Univ., Xi'an, China (Guiming Zhang; Libo Zhao; Zhuangde Jiang; Longqi Xu; Jiuhong Wang) \|\| Xinjiang Vocational & Tech. Coll. of Commun., Urumqi, China (Rahman-Hebitul)
Abstract	The working principle and fabrication process of MEMS density sensor have been studied in this paper. And the density experiments were performed in acetone and silicon oil at temperatures in the range from 20.0 to 50.0 °C under atmospheric pressure. The maximum deviation and the average absolute deviation between the density experimental results and the reference values are -0.72% and 0.32%, respectively. Because of the small volume of MEMS density sensor, the required fluid volume for experiment is small and doesn't exceed 100 μL in general.
Starting Page	167
Ending Page	169
File Size	329692
Page Count	3
File Format	PDF
e-ISBN	9781479916573
DOI	10.1109/ISAM.2013.6643518
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2013-07-30
Publisher Place	China
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fluids Temperature measurement Density measurement Resonant frequency Silicon Micromechanical devices Temperature sensors Piezoresistive MEMS density sensor Microcantilever
Content Type	Text
Resource Type	Article

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