NDLI: Charging in Dielectricless Capacitive RF-MEMS Switches

Content Provider	IEEE Xplore Digital Library
Author	Mardivirin, D. Pothier, A. Crunteanu, A. Vialle, B. Blondy, P.
Copyright Year	1963
Abstract	This paper presents results on high lifetime RF microelectromechanical (RF-MEMS) dielectricless capacitive switches. Using air gap variation only, these RF MEMS capacitive switches achieve a capacitance ratio of 9, associated with small residual charging. The reliability of the switch has been studied, pull-in and pull-out voltages shifts have been observed, modeled and validated with good agreement between model and measurements for a switch held for one month in the down state. The dependence of charging mechanism to the biasing signal is also presented by applying unipolar and bipolar waveforms with different duty cycles. Charging can be modeled using a simple Curie-Von Schweidler equation. It is shown that the duty cycle of the bias signal is strongly accelerating switch failure, and that using bipolar signals improves the lifetime of these switches by several orders of magnitude. The projected lifetime of current RF-MEMS dielectricless switches held in the down state using bipolar signals is several tens of years.
Sponsorship	IEEE Microwave Theory and Techniques Society
Starting Page	231
Ending Page	236
Page Count	6
File Size	1035652
File Format	PDF
ISSN	00189480
Volume Number	57
Issue Number	1
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Radiofrequency microelectromechanical systems Switches Voltage Dielectric measurements Power system reliability Radio frequency Dielectrics and electrical insulation Electrodes Dielectric substrates Time measurement RF-MEMS reliability Capacitive switches dielectric charging RF microelectromechanical systems (RF-MEMS)
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electrical and Electronic Engineering Radiation

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

Time and voltage dependence of dielectric charging in RF MEMS capacitive switches

On the modeling of dielectric charging in RF-MEMS capacitive switches

Contactless Dielectric Charging Mechanisms in RF-MEMS Capacitive Switches

Carbon Nanotube Based Dielectric for Enhanced RF MEMS Reliability

Reliability modeling of capacitive RF MEMS

Top vs. bottom charging of the dielectric in RF MEMS capacitive switches

New insights into charging in capacitive RF MEMS switches

Contactless Dielectric Charging Mechanisms in RF-MEMS Capacitive Switches

High-Cycle Life Testing of RF MEMS Switches

Charging in Dielectricless Capacitive RF-MEMS Switches

Similar Documents

Time and voltage dependence of dielectric charging in RF MEMS capacitive switches

On the modeling of dielectric charging in RF-MEMS capacitive switches

Contactless Dielectric Charging Mechanisms in RF-MEMS Capacitive Switches

Carbon Nanotube Based Dielectric for Enhanced RF MEMS Reliability

Reliability modeling of capacitive RF MEMS

Top vs. bottom charging of the dielectric in RF MEMS capacitive switches

New insights into charging in capacitive RF MEMS switches

Contactless Dielectric Charging Mechanisms in RF-MEMS Capacitive Switches

High-Cycle Life Testing of RF MEMS Switches

Charging in Dielectricless Capacitive RF-MEMS Switches