NDLI: Excimer laser ablation and etching

Content Provider	IEEE Xplore Digital Library
Author	Brannon, J.
Copyright Year	1988
Abstract	Today, excimer laser ablation and etching techniques have found use in applications ranging from semiconductor processing to correcting human vision problems. This article discusses these techniques, as well as some relevant engineering issues. The progress of excimer lasers in patterning technology is briefly presented, and the article concludes by discussing several applications of ablation and etching that have high potential industrial use and significance.
Starting Page	11
Ending Page	18
Page Count	8
File Size	1111243
File Format	PDF
ISSN	87553996
Volume Number	13
Issue Number	2
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1997-03-01
Publisher Place	U.S.A.
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Surface emitting lasers Laser ablation Gas lasers Pulsed laser deposition Semiconductor lasers Etching Optical materials Solid lasers Optical pulses Laser beam cutting
Content Type	Text
Resource Type	Article
Subject	Instrumentation Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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Excimer laser ablation and etching