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Content Provider | IEEE Xplore Digital Library |
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Author | Face, D.W. Nestlerode, J.P. |
Copyright Year | 2002 |
Abstract | Epitaxial TlBa/sub 2/CaCu/sub 2/O/sub 7/ thin films have been grown on single-crystal LaAlO/sub 3/, NdGaO/sub 3/, and CeO/sub 2/ buffered sapphire substrates by in situ off-axis magnetron sputtering in the presence of Tl/sub 2/O vapor. Phase formation in this system has been investigated for substrate temperatures from 490 degrees C to 600 degrees C and deposition pressures from 50 mTorr to 300 mTorr. The effect of Tl/sub 2/O evaporation rate has also been studied. X-ray diffraction shows that films deposited under optimum conditions are highly epitaxial with the c-axis perpendicular to the substrate surface and |
Sponsorship | Council on Superconductivity Appl. Superconductivity Conference Inc MIT |
Starting Page | 1516 |
Ending Page | 1519 |
Page Count | 4 |
File Size | 482450 |
File Format | |
ISSN | 10518223 |
Volume Number | 3 |
Issue Number | 1 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 1993-03-01 |
Publisher Place | U.S.A. |
Access Restriction | One Nation One Subscription (ONOS) |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Sputtering Substrates Superconducting films High temperature superconductors Superconducting thin films Superconducting transition temperature Surface resistance Nonhomogeneous media Thin film devices Pressure control |
Content Type | Text |
Resource Type | Article |
Subject | Condensed Matter Physics Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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