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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Meng, X.F. Pierce, F.S. Wong, K.M. Amos, R.S. Xu, C.H. Deaver Jr., B.S. Poon, S.J. |
| Copyright Year | 1965 |
| Abstract | High-T/sub c/ YBaCuO superconducting films have been prepared in-situ on Si substrates with buffer layers using off-axis single-target RF magnetron sputtering. A special cylinder heater with a reflecting cone was used to grow in-situ YBaCuO films on different buffer layers, such as Y-stabilized ZrO/sub 2/ (YSZ), LaAlO/sub 3/, LaGaO/sub 3/, NdAlO/sub 3/, NdGaO/sub 3/, SrTiO/sub 3/, and MgO. The YBaCuO films on YSZ and LaAlO/sub 3/ buffer layers have T/sub c/(zero) of 84 K and 83 K, respectively. Films deposited at substrate temperatures above 650 degrees C have preferential orientation with c-axis perpendicular to the film surface. The films also show excellent surface smoothness up to atomic scale with a roughness of 5 AA. The qualities of the films as well as the dielectric properties of the substrate and buffer layers are favorable for microelectronic applications, especially for high-frequency applications. High-T/sub c/ microbridges have been fabricated using the films. |
| Sponsorship | IEEE Magnetics Society |
| Starting Page | 1638 |
| Ending Page | 1641 |
| Page Count | 4 |
| File Size | 432193 |
| File Format | |
| ISSN | 00189464 |
| Volume Number | 27 |
| Issue Number | 2 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1991-03-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Yttrium barium copper oxide Semiconductor films Buffer layers Superconducting films Dielectric substrates Optical films Rough surfaces Surface roughness Radio frequency Superconducting magnets |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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