NDLI: Fabrication of Flexible Amorphous-Si Thin-Film Solar Cells on a Parylene Template Using a Direct Separation Process

Content Provider	IEEE Xplore Digital Library
Author	Shih-Yung Lo Dong-Sing Wuu Chia-Hao Chang Chao-Chun Wang Shui-Yang Lien Horng, R.-H.
Copyright Year	1963
Abstract	In this paper, we report on the fabrication of flexible amorphous-silicon (a-Si) thin-film solar cells on a parylene template carried by a glass plate without any adhesive. The a-Si thin-film solar cells could be separated directly from the glass carrier after a process temperature of up to 200°C. The a-Si and parylene films were deposited using high-frequency plasma-enhanced chemical vapor deposition and a parylene reactor. The parylene-coated glass plate was treated with thermal annealing and Ar, N₂, or O₂ plasma. Moreover, SiNx and/or SiOx films were used as barrier layers between the transparent conductive oxide and parylene films. Details of different gas plasmas and barrier effects were investigated in terms of surface morphologies and solar cell characteristics. The a-Si thin-film solar cell on a parylene template with an open-circuit voltage of 0.74 V, a short-circuit current density of 15.69 mA/cm², a fill factor of 54.98%, and a conversion efficiency of 5.78 % could be obtained. After the 10-mm-radius bending test for 5000 times, the a-Si thin-film solar cells still exhibited a conversion efficiency of 4.94%. These results indicated that a-Si thin-film solar cells on parylene templates have high potential for flexible photovoltaic applications.
Sponsorship	IEEE Electron Devices Society
Starting Page	1433
Ending Page	1439
Page Count	7
File Size	674261
File Format	PDF
ISSN	00189383
Volume Number	58
Issue Number	5
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-05-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Photovoltaic cells Plasmas Glass Surface treatment Substrates Surface roughness Rough surfaces solar cell Amorphous silicon (a-Si) direct separation flexible parylene
Content Type	Text
Resource Type	Article
Subject	Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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