NDLI: Design, Identification, and Control of a Flexure-Based <emphasis emphasistype=italic>XY </emphasis> Stage for Fast Nanoscale Positioning

Content Provider	IEEE Xplore Digital Library
Author	Yuen Kuan Yong Aphale, S.S. Reza Moheimani, S.O.
Copyright Year	2002
Abstract	The design, identification, and control of a novel, flexure-based, piezoelectric stack-actuated XY nanopositioning stage are presented in this paper. The main goal of the design is to combine the ability to scan over a relatively large range (25times25 mum) with high scanning speed. Consequently, the stage is designed to have its first dominant mode at 2.7 kHz. Cross-coupling between the two axes is kept to -35 dB, low enough to utilize single-input--single-output control strategies for tracking. Finite-element analysis (FEA) is used during the design process to analyze the mechanical resonance frequencies, travel range, and cross-coupling between the X- and Y-axes of the stage. Nonlinearities such as hysteresis are present in such stages. These effects, which exist due to the use of piezoelectric stacks for actuation, are minimized using charge actuation. The integral resonant control method is applied in conjunction with feedforward inversion technique to achieve high-speed and accurate scanning performances, up to 400 Hz.
Sponsorship	IEEE Nanotechnology Council
Starting Page	46
Ending Page	54
Page Count	9
File Size	789112
File Format	PDF
ISSN	1536125X
Volume Number	8
Issue Number	1
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Resonance Nanopositioning Resonant frequency Bandwidth Control systems Scanning probe microscopy Australia Council Nanobioscience Piezoelectric actuators Finite element methods nanopositioning stage Feedforward inversion integral resonant control (IRC) mechanical design
Content Type	Text
Resource Type	Article
Subject	Nanoscience and Nanotechnology Electrical and Electronic Engineering Computer Science Applications

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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