NDLI: CMOS single-chip gas detection system comprising capacitive, calorimetric and mass-sensitive microsensors

Content Provider	IEEE Xplore Digital Library
Author	Hagleitner, C. Lange, D. Hierlemann, A. Brand, O. Baltes, H.
Copyright Year	1966
Abstract	A single-chip gas detection system fabricated in industrial CMOS technology combined with post-CMOS micro-machining is presented. The sensors rely on a chemo-sensitive polymer layer, which absorbs predominantly volatile organic compounds (VOCs). A mass-sensitive resonant-beam oscillator, a capacitive sensor incorporated into a second-order /spl Sigma//spl Delta/-modulator, a calorimetric sensor with low-noise signal conditioning circuitry and a temperature sensor are monolithically integrated on a single chip along with all necessary driving and signal conditioning circuitry. The preprocessed sensor signals are converted to the digital domain on chip. An additional integrated controller sets the sensor parameters and transmits the sensor values to an off-chip data recording unit via a standard serial interface. A 6-chip-array has been flip-chip packaged on a ceramic substrate, which forms part of a handheld VOC gas detection unit. Limits of detection (LOD) of 1-5 ppm n-octane, toluene or propan-1-ol have been achieved.
Sponsorship	IEEE Solid-State Circuits Society IEEE Electron Devices Society IEEE Circuits and Systems Society Japan Society of Applied Physics (JSAP) IEEE Microwave Theory and Techniques Society IEEE San Francisco Section Bay Area Council Univ. PA IEEE
Starting Page	1867
Ending Page	1878
Page Count	12
File Size	1670900
File Format	PDF
ISSN	00189200
Volume Number	37
Issue Number	12
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-12-01
Publisher Place	U.S.A.
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Microsensors CMOS technology Gas detectors Capacitive sensors Temperature sensors RLC circuits Gas industry Textile industry Chemical technology Integrated circuit technology
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Libarray of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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