NDLI: Micro-opto-mechanical 2/spl times/2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation

Content Provider	IEEE Xplore Digital Library
Author	Marxer, C. de Rooij, N.F.
Copyright Year	1983
Abstract	This paper reports on a new optical 2/spl times/2 switch for single-mode fibers. The switching principle is based on a vertical micro-mirror which can be moved into the optical path to switch light between two pairs of fibers. The micromirror switch is designed for by-pass applications. When power is turned off the mirror spring back into its rest position and brings the switch into its bar state. This operation is very reliable, since the moving parts do not get into contact. Fabrication is based on the silicon micromachining technology, which allows to integrate the switching mirror, its electrostatic actuator and the alignment grooves for the fibers on the same chip. The mechanical switching principle brings with it a number of optical advantages such as a high crosstalk attenuation above 50 dB and wavelength and polarization insensitivity. At a wavelength of 1310 nm a minimum insertion loss of 0.6 dB was measured in the bar state, i.e. when the mirror is out of the optical path. In the cross state the light is reflected on the gold coated micro-mirror which has a reflectivity of about 80%. The insertion loss of the bar state was thus higher and a minimum value of 1.6 dB could be obtained. The switching time was well below 1 ms.
Sponsorship	IEEE Lasers and Electro-Optics Society Optical Society of America
Starting Page	2
Ending Page	6
Page Count	5
File Size	386878
File Format	PDF
ISSN	07338724
Volume Number	17
Issue Number	1
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1999-01-01
Publisher Place	U.S.A.
Access Restriction	One Nation One Subscription (ONOS)
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optical switches Optical fiber polarization Optical attenuators Optical crosstalk Mirrors Optical losses Insertion loss Micromirrors Springs Contacts
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics

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