NDLI: Out-of-plane refractive microlens fabricated by surface micromachining

Content Provider	IEEE Xplore Digital Library
Author	King, C.R. Lin, L.Y. Wu, M.C.
Copyright Year	1989
Abstract	A novel refractive microlens standing perpendicular to the substrate has been fabricated for the first time with surface-micromachining techniques. The microlens has a focal length of 670 /spl mu/m and a diameter of 300 /spl mu/m. The optical axis of the microlens is precisely defined by photolithography and can be pre-aligned to other surface-micromachined micro-optical elements integrated on the same substrate. The focusing and collimating abilities of the lens are successfully demonstrated. The refractive microlens offers higher efficiency compared with diffractive lenses, and is very useful for high-performance free-space micro-optical bench applications.
Sponsorship	IEEE Lasers and Electro-Optics Society
Starting Page	1349
Ending Page	1351
Page Count	3
File Size	484870
File Format	PDF
ISSN	10411135
Volume Number	8
Issue Number	10
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1996-10-01
Publisher Place	U.S.A.
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Lenses Microoptics Micromachining Optical refraction Optical sensors Optical surface waves Optical diffraction Integrated optics Lithography Fresnel reflection
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering Atomic and Molecular Physics, and Optics Electronic, Optical and Magnetic Materials

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
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7	National Digital Libarray of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
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9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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