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Content Provider | IEEE Xplore Digital Library |
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Author | Phatthanakun, R. Pantong, C. Sriphung, C. Pummara, W. Chomnawang, N. |
Copyright Year | 2012 |
Description | Author affiliation: Synchrotron Light Research Institute (Public Organization), 111 University Avenue, Nakhon Ratchasima 30000, Thailand (Phatthanakun, R.; Sriphung, C.) || School of Electrical Engineering, Suranaree University of Technology, Nakhon Ratchasima 30000, Thailand (Pantong, C.; Pummara, W.; Chomnawang, N.) |
Abstract | This paper presents a rapid reproduction method of microparts based on the standard X-ray LIGA processes. The SU-8 master mold of microparts is fabricated by X-ray lithography which offers the high aspect ratio microstrucutre with vertical sidewall for high precision microparts. A 10∶1 mixture of pre-polymer PDMS is cast onto the master mold and peeled off to create the replicated PDMS. It is pressed on the substrate coated with chromium seed layer, resulting in the temporary bonding between them. Nickel is then grown inside the replicated PDMS to create another metallic micropart by electroplating. After the replicated PDMS is removed from the sample, the over-electroplated microparts are covered with unexposed SU-8 photoresist and planarized to achieve the final thickness, followed by photoresist removal. The metallic microparts are finally released from the substrate by the mechanical force, resulting in the massive reproduced metallic microparts. The key geometric dimensional changes throughout the process were less than 1% which obviously confirmed the reliability of the reproduction using X-ray LIGA technology. The proposed method offers the rapid replication of micromolds and microparts in low-cost mass production without further X-ray lithography process. |
Starting Page | 1 |
Ending Page | 4 |
File Size | 1503570 |
Page Count | 4 |
File Format | |
ISBN | 9781467320269 |
e-ISBN | 9781467320252 |
DOI | 10.1109/ECTICon.2012.6254192 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2012-05-16 |
Publisher Place | Thailand |
Access Restriction | Subscribed |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Mass production micromolding X-ray lithography synchrotron light Resists mass production Chromium replicated PDMS Microstructure Substrates Standards microparts |
Content Type | Text |
Resource Type | Article |
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