NDLI: Design of high-frequency broadband CMUT arrays

Content Provider	IEEE Xplore Digital Library
Author	Xiao Zhang Yamanery, F.Y. Adelegan, O. Oralkan, O.
Copyright Year	2015
Description	Author affiliation: Dept. of Electr. & Electron. Eng., Istanbul Medipol Univ., Istanbul, Turkey (Yamanery, F.Y.) \|\| Dept. of Electr. & Comput. Eng., North Carolina State Univ., Raleigh, NC, USA (Xiao Zhang; Adelegan, O.; Oralkan, O.)
Abstract	In this work we demonstrate a high-frequency (29-MHz) broadband (100% FBW) CMUT 1D array. The devices are fabricated using anodic bonding with only three photolithography steps. We also discuss the design guidelines for high-frequency broadband CMUTs using the simulations. A high fill factor and a thin plate are important for the broadband design. Small cell size is required for the increased center frequency. To improve the transducer sensitivity and to keep the collapse voltage low, the gap height should be small and a high-k dielectric insulation layer should be employed. The fabrication steps we report in this paper have good potential to meet the high-frequency broadband CMUT design requirements. So far we have demonstrated that we can define a 50-nm gap, bond to a post as narrow as 2 μm, and pattern a high-k dielectric layer on the bottom electrode.
Starting Page	1
Ending Page	4
File Size	6310988
Page Count	4
File Format	PDF
e-ISBN	9781479981823
DOI	10.1109/ULTSYM.2015.0167
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-10-21
Publisher Place	Taiwan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Bonding Broadband communication Insulation Silicon nitride Electrodes Bandwidth Glass High frequency transducer array Broadband CMUT Anodic bonding
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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